MEMS laser scan projection display is ideal for wide FOV AR/MR near eye display. In addition to optical combiner based virtual display technologies, laser scan projection offers an unique wide FOV solution called Retinal Scan Display (RSD) by scanning very low power laser beam over viewer's retina to form images.
With fiber coupled RGB lasers and a 2D MEMS mirror, designer can separate the near eye display from the bulky electronics and battery for a compact and lightweight AR HMD. A light field RSD can also be implemented with fiber coupled laser array and a MEMS scanning mirror.
3D depth sensing is vital for VR/AR/MR applications. Our compact 1D and 2D MEMS mirrors enable focus free and programmable structured light patterns providing high resolution MEMS depth sensing camera compact enough to fit into mobile and AR/MR head mount devices.
We have developed a large FOV solution for customer to implement AR contents in head-up display. The solution provides virtual image over 15,000 nits brightness at 2x FOV of current LCD based HUD system.
Opus Microsystems' 1D and 2D MEMS scanning mirror are designed with electrostatic micro-actuator monolithically integrated with the mirror based on proprietary IPs. The MEMS mirrors offer excellent performance at ultra low power consumption in the most compact package in the market. The MEMS mirrors are fabricated by our world class strategic MEMS manufacturing partners for large volume production.
Features of Opus Microsystems' MEMS scanning mirrors
Our 1D MEMS mirrors are designed for resonant operation with optical scanning angle as large as 86 deg. Millimeter size mirrors with resonant frequencies in the range from 500Hz to several kilohertz are available.
The 1D MEMS mirror is coated with gold for high reflectivity in NIR and IR applications such as structured light projection for 3D camera, bio-medical sensing, laser printing, LiDAR and etc.
We developed both resonant scan and raster scan 2D MEMS scanning mirrors with gimbaled architecture to allow the mirror to oscillate about two orthogonal axes. The raster scan 2D MEMS mirror is designed with resonant motion in the fast axis and controllable motion in the slow axis to realize HD720P or higher resolution projection display. The bi-resonant 2D MEMS mirror can be driven by PWM signals for resonant oscillation in both axes for a lissajous scanned pattern.
Opus Microsystems provides complete MEMS laser scan projection solution including MEMS laser scan projection chipset, and reference designs of projection module. MEMS projection chipset consists of raster scan 2D MEMS mirror, mirror position sensor, and scan display controller for processing video signal, laser color management and MEMS control.
Opus Microsystems' laser scan projection solution: